Journals Higher Education
Important OUP's Response to COVID-19 Learn more



This item is printed to order. Items which are printed to order are normally despatched and charged within 5-10 days.

Published: 28 May 1998

356 Pages | 2 colour plates, 5 halftones, numerous line figures


ISBN: 9780198562870

Also Available As:


Bookseller Code (AQ)

Plasma Etching

Fundamentals and Applications

M. Sugawara

Series on Semiconductor Science and Technology

  • * Technologically very important in semiconductor business. No other recent books
  • * Japanese area of strength and expertise.
  • * Complements (at a higher level) parts of Herbst and Campbell (see Related Books below)

Also of Interest