Journals Higher Education

£145.00

Hardback

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Published: 28 May 1998

356 Pages | 2 colour plates, 5 halftones, numerous line figures

234x156mm

ISBN: 9780198562870


Also Available As:

Ebook


Bookseller Code (AQ)

Plasma Etching

Fundamentals and Applications

M. Sugawara

Series on Semiconductor Science and Technology

  • * Technologically very important in semiconductor business. No other recent books
  • * Japanese area of strength and expertise.
  • * Complements (at a higher level) parts of Herbst and Campbell (see Related Books below)
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