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Published: 01 May 2012

840 Pages | 545 illus.

7 x 10 inches

ISBN: 9780199734214

Also Available As:


Bookseller Code (06)

Nanofabrication Using Focused Ion and Electron Beams

Principles and Applications

Edited by Ivo Utke, Stanislav Moshkalev, and Phillip Russell

Oxford Series on Nanomanufacturing

  • The first book to deal with three nanofabrication techniques together
  • Ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.
  • Focuses on practical details of using focused ion and electron beams with and without gas assistance
  • Gathers for the first time expert authors from each science field who describe the latest state of the art fundamentals and experimental findings in their field