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£143.99

Paperback

Published: 20 December 2012

688 Pages

235x191mm

ISBN: 9780199861224


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Fabrication Engineering at the Micro- and Nanoscale

Fourth Edition

Stephen A. Campbell

The Oxford Series in Electrical and Computer Engineering

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at ...