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Published: 20 December 2012

688 Pages


ISBN: 9780199861224

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This text is published by OUP Higher Education Division

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Fabrication Engineering at the Micro- and Nanoscale

Fourth Edition

Stephen A. Campbell

The Oxford Series in Electrical and Computer Engineering

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at ...


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