Journals Higher Education

$199.00

Hardcover

30 July 1998

362 Pages | 3 color illus, 205 b/w linecuts & halftones

ISBN: 9780198562870


Also Available As:

Ebook


Bookseller Code (06)

Cover
Companion website

Plasma Etching

Fundamentals and Applications

M. Sugawara
With contributions from Barry L. Stansfield, S. Handa, K. Fujita, S. Watanabe, and T. Tsukamoto

Series on Semiconductor Science and Technology

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